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NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
(A) study on the ald modeling for process design of multi-component thin films = 다성분계박막 공정설계를 위한 원자층증착법 모델링에 대한 연구link

Chung, Hoi-Sung; 정회성; Kang, Sang-Won; 강상원, 한국과학기술원, 2008

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