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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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ECR plasma enhanced DC magnetron multi-target sputtering 방법을 이용한 $Pb(Zr,Ti)O_3$ 박막의 제조 및 특성 평가 연구 = Preparation and characterization of $Pb(Zr,Ti)O_3$ thin films by ECR plasma enhanced DC magnetron multi-target sputteringlink 김성태; Kim, Sung-Tae; 이원종; Lee, Won-Jong, 한국과학기술원, 1997 |
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