DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Yoon, Young-Ku | - |
dc.contributor.advisor | 윤용구 | - |
dc.contributor.author | Yoon, Young-Soo | - |
dc.contributor.author | 윤영수 | - |
dc.date.accessioned | 2011-12-14T08:03:22Z | - |
dc.date.available | 2011-12-14T08:03:22Z | - |
dc.date.issued | 1994 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69738&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/48831 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 원자력공학과, 1994.8, [ xiv, 178 p. ] | - |
dc.description.abstract | This study reports on the characteristics and the role as a buffer layer for $YBa_2Cu_3O_{7-x}$ of the $BaTiO_{3a}$ thin films deposited on (100) p-Si, (111) InSb and indium tin oxide-coated (ITO) soda lime glass substrates by metalorganic chemical vapor deposition (MOCVD). The as-grown BaTiO$_3$ films deposited on various substrates at different temperatures below $600\,^\circ\!C$ had mirror like surfaces without having any indication of pin-holes, which was confirmed by Normarski optical microscopy. The results of the AES measurements of the $BaTiO_3$ films on (100) Si showed that the films have a stoichiometric composition containing barium, titanium, and oxygen. The ratios of the peak-to-peak intensities of the $Ba_{\text{KLL}}$, $Ti_{\text{KLL}}$, and $O_{\text{KLL}}$ peaks of the $BaTiO_3$ films were similar to those of a standard bulk $BaTiO_3$ sample. The results of X-ray diffraction (XRD) and the high-resolution cross sectional transmission electron microscopy (XTEM) results suggested as follows : The as-grown film on (100) Si exhibited a highly [110] oriented polycrystal film growth with the amorphous interfacial layer. The $BaTiO_3$ film deposited on (111) InSb at $300\,^\circ\!C$ had the peak occurring at $2 \theta=31.26\,^\circ$, which arise from the three-dimensional, partially epitaxial microcrystal at the interface. The films grown on ITO glass at substrate temperature of $400\,^\circ\!C$ and $550\,^\circ\!C$ were of an amorphous phase($\alpha-BaTiO_3$). Atomic force microscopy (AFM) measurements under ambient conditions showed that the surface morphologies of the as-grown $BaTiO_3$ film were strongly influenced not only by crystallinity such as amorphism but also by growth characteristics. The plots of capacitance-voltage (C-V) for the $BaTiO_3$ thin films on (100) Si and (111) InSb substrates were similar to that of the C-V measurements of an ordinary prepared $Al/SiO_2/Si$ diode. The dielectric constants of films on (100) Si and (111) InSb de... | eng |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.title | (A) study on characteristics and role as a buffer layer for $YBa_2Cu_3O_{7-x}$ of $BaTiO_3$ thin films deposited by metalorganic chemical vapor deposition | - |
dc.title.alternative | 유기금속화학기상증착법으로 증착된 $BaTiO_3$ 박막의 특성 및 $YBa_2Cu_3O_{7-x}$의 완충층으로써의 역할에 관한 연구 | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 69738/325007 | - |
dc.description.department | 한국과학기술원 : 원자력공학과, | - |
dc.identifier.uid | 000885297 | - |
dc.contributor.localauthor | Yoon, Young-Soo | - |
dc.contributor.localauthor | 윤영수 | - |
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