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A silicon nitride microdisk resonator with a 40-nm-thin horizontal air slot

Lee, Shin-Young; Eom, Seok-Chan; Chang, Jee-Soo; Huh, Chul; Sung, Gun-Yong; Shin, Jung-Hoon, OPTICS EXPRESS, v.18, no.11, pp.11209 - 11215, 2010-05

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