비교란 탐침을 이용한 RF 유도플라즈마에서의 전기장 측정Electric field measurement in an inductively coupled plasma by a non-disturbing probe
- Advisors
- 이순칠researcher; Lee, Soon-Chilresearcher
- Description
- 한국과학기술원 : 물리학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 112634/325007 / 000953455
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 물리학과, 1997.2, [ [ii], 38 p. ]
- Keywords
비교란 탐침; 압전공명; 유도결합 플라즈마; Inductively coupled plasma; Non disturbing probe; Piezoelectric resonance
- Appears in Collection
- PH-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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