Micro-lithography 를 위한 4 구면경계의 설계 및 수차해석Optical CAD and analyses of four spherical mirror system for micro-lithography

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dc.contributor.advisor이상수-
dc.contributor.advisorLee, Sang-Soo-
dc.contributor.author조영민-
dc.contributor.authorCho, Young-Min-
dc.date.accessioned2011-12-14T07:51:40Z-
dc.date.available2011-12-14T07:51:40Z-
dc.date.issued1991-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67693&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/48275-
dc.description학위논문(석사) - 한국과학기술원 : 물리학과, 1991.2, [ [iii], 62 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.titleMicro-lithography 를 위한 4 구면경계의 설계 및 수차해석-
dc.title.alternativeOptical CAD and analyses of four spherical mirror system for micro-lithography-
dc.typeThesis(Master)-
dc.identifier.CNRN67693/325007-
dc.description.department한국과학기술원 : 물리학과, -
dc.identifier.uid000891477-
dc.contributor.localauthor조영민-
dc.contributor.localauthorCho, Young-Min-
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PH-Theses_Master(석사논문)
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