Micro-lithography 를 위한 4 구면경계의 설계 및 수차해석Optical CAD and analyses of four spherical mirror system for micro-lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이상수 | - |
| dc.contributor.advisor | Lee, Sang-Soo | - |
| dc.contributor.author | 조영민 | - |
| dc.contributor.author | Cho, Young-Min | - |
| dc.date.accessioned | 2011-12-14T07:51:40Z | - |
| dc.date.available | 2011-12-14T07:51:40Z | - |
| dc.date.issued | 1991 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67693&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/48275 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 물리학과, 1991.2, [ [iii], 62 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | Micro-lithography 를 위한 4 구면경계의 설계 및 수차해석 | - |
| dc.title.alternative | Optical CAD and analyses of four spherical mirror system for micro-lithography | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 67693/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000891477 | - |
| dc.contributor.localauthor | 조영민 | - |
| dc.contributor.localauthor | Cho, Young-Min | - |
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- PH-Theses_Master(석사논문)
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