RF 글로우 방전에 의한 boron 및 phosphorous 가 도핑된 미세결정 규소의 제작에 관한 연구Fabrication of boron and phosphorous doped microcrystalline silicon by RF glow discharge method
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이주천 | - |
| dc.contributor.advisor | Lee, Choo-Chon | - |
| dc.contributor.author | 이왕주 | - |
| dc.contributor.author | Lee, Wang-Joo | - |
| dc.date.accessioned | 2011-12-14T07:50:22Z | - |
| dc.date.available | 2011-12-14T07:50:22Z | - |
| dc.date.issued | 1988 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=66113&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/48191 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 물리학과, 1988.2, [ ii, 27 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | RF 글로우 방전에 의한 boron 및 phosphorous 가 도핑된 미세결정 규소의 제작에 관한 연구 | - |
| dc.title.alternative | Fabrication of boron and phosphorous doped microcrystalline silicon by RF glow discharge method | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 66113/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000861318 | - |
| dc.contributor.localauthor | 이왕주 | - |
| dc.contributor.localauthor | Lee, Wang-Joo | - |
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- PH-Theses_Master(석사논문)
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