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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Theses_Master(석사논문)

전자 현미경 관찰에 의한 3층 레지스트 리소그라피 연구Electron microscopic investigation on trilayer resist processing for fine line optical lithography

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남기수 / Nam, Kee-Soo
Advisors
박신종researcher; 이상수researcher; Park, Sin-Chongresearcher; Lee, Sang-Sooresearcher
Description
한국과학기술원 : 물리학과,
Publisher
한국과학기술원
Issue Date
1986
Identifier
65015/325007 / 000821913
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 물리학과, 1986.2, [ iv, 71 p. ]

URI
http://hdl.handle.net/10203/48130
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=65015&flag=dissertation
Appears in Collection
PH-Theses_Master(석사논문)
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