LPCVD 방법으로 증착한 비정질 실리콘 박막의 다결정화에 관한 연구Solid phase crystallization of amorphous silicon films deposited by LPCVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이주천 | - |
| dc.contributor.advisor | Lee, Choo-Chon | - |
| dc.contributor.author | 이욱형 | - |
| dc.contributor.author | Lee, Wook-Hyoung | - |
| dc.date.accessioned | 2011-12-14T07:45:38Z | - |
| dc.date.available | 2011-12-14T07:45:38Z | - |
| dc.date.issued | 1992 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=60437&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47887 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 물리학과, 1992.2, [ [ii], 42 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | LPCVD 방법으로 증착한 비정질 실리콘 박막의 다결정화에 관한 연구 | - |
| dc.title.alternative | Solid phase crystallization of amorphous silicon films deposited by LPCVD | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 60437/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000901381 | - |
| dc.contributor.localauthor | 이욱형 | - |
| dc.contributor.localauthor | Lee, Wook-Hyoung | - |
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