ECR (electron cyclotron resonance) -PECVD 방법으로 증착한 미세결정 규소박막의 특성에 관한 연구Characteristics of microcrystalline silicon prepared by ECR-PECVD
- Advisors
- 이주천; Lee, Choo-Chon
- Description
- 한국과학기술원 : 물리학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1992
- Identifier
- 59973/325007 / 000901135
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 물리학과, 1992.2, [ [ii], 43 p. ]
- Appears in Collection
- PH-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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