불소이온 주입된 규소의 라만 산란 연구와 보론 확산에 미치는 불소의 영향연구Raman scattering from $F^+$ implanted Si and fluorine influence on boron diffusion
- Advisors
- 김종진; Kim, Jong-Jean
- Description
- 한국과학기술원 : 물리학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 128497/325007 / 000935154
- Language
- kor
- Description
학위논문(박사) - 한국과학기술원 : 물리학과, 1997.8, [ vi, 83 p. ]
- Keywords
확산; 불소; 규소; 라만산란; 점결함; Point defect; Diffusion; Flourine; Raman scattering; Si
- Appears in Collection
- PH-Theses_Ph.D.(박사논문)
- Files in This Item
- There are no files associated with this item.
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