모든 3차 수차를 제거하여 회절한계의 성능을 지닌 극자외선 lithography용 4-반사경 광학계(배율1)
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 공홍진 | - |
| dc.contributor.advisor | 이상수 | - |
| dc.contributor.advisor | Kong, Hong-Jin | - |
| dc.contributor.advisor | Lee, Sang-Soo | - |
| dc.contributor.author | 조영민 | - |
| dc.contributor.author | Cho, Young-Min | - |
| dc.date.accessioned | 2011-12-14T07:26:13Z | - |
| dc.date.available | 2011-12-14T07:26:13Z | - |
| dc.date.issued | 1994 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68909&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/47490 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 1994.2, [ iv, 94 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 모든 3차 수차를 제거하여 회절한계의 성능을 지닌 극자외선 lithography용 4-반사경 광학계(배율 | - |
| dc.title.alternative | 1) | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 68909/325007 | - |
| dc.description.department | 한국과학기술원 : 물리학과, | - |
| dc.identifier.uid | 000895477 | - |
| dc.contributor.localauthor | 조영민 | - |
| dc.contributor.localauthor | Cho, Young-Min | - |
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- PH-Theses_Ph.D.(박사논문)
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