DC Field | Value | Language |
---|---|---|
dc.contributor.advisor | Choe, Won-Ho | - |
dc.contributor.advisor | 최원호 | - |
dc.contributor.author | Moon, Se-Youn | - |
dc.contributor.author | 문세연 | - |
dc.date.accessioned | 2011-12-14T07:24:37Z | - |
dc.date.available | 2011-12-14T07:24:37Z | - |
dc.date.issued | 2006 | - |
dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=254167&flag=dissertation | - |
dc.identifier.uri | http://hdl.handle.net/10203/47387 | - |
dc.description | 학위논문(박사) - 한국과학기술원 : 물리학과, 2006.2, [ xii, 107 p. ] | - |
dc.description.abstract | The physical properties and application feasibilities were studied using atmospheric radio-frequency (RF) capacitive discharge sources. From the fundamental study of a typical RF capacitively coupled discharge source, a new type of atmospheric pressure discharge source was suggested for large-area plasma generation with low-breakdown voltage and low gas temperature. In addition, spectroscopic methods were developed and applied to the atmospheric plasmas for measuring plasma parameters. In an atmospheric pressure capacitive discharge, α and γ discharge modes of a helium discharge were investigated by varying the discharge gap distance between the two electrodes from 1~mm to 5~mm. As similarly observed in other experiments, the α- and γ-mode and the α-γ mode transition were observed with nearly 40% drop in the voltage, 67% drop in the phase angle between the voltage and current, and contraction of the plasma volume. The discharge voltage, at which the α-γ mode transition occurred, versus the inter-electrode gap distance showed a similar behavior with the Paschen curve for gas breakdown. Depending on the discharge gap distance, normal and abnormal glow regimes were observed in the α-mode. At 1 and 2~mm, the α-mode was remained in the abnormal glow discharge with a increasing current until the α-γ mode transition occurred. At 3mm, however, the α-mode was excited as a normal glow discharge with a constant current density (17 mA/cm²), then, it became an abnormal glow discharge as the current increased. At 4 mm, the α-mode was sustained as a normal glow discharge until the transition to the γ-mode occurred. Using a simple resistor-capacitor (RC) electrical circuit model and a α-sheath breakdown model, the discharge modes and the mode transition were studied. Based on these results, an atmospheric large-area capacitive discharge source consisted of a double electrode structure was developed. This discharge configuration provided stable and large ar... | eng |
dc.language | eng | - |
dc.publisher | 한국과학기술원 | - |
dc.subject | large-area plasma | - |
dc.subject | discharge mode | - |
dc.subject | 대기압 플라즈마 | - |
dc.subject | 광진단 | - |
dc.subject | 대면적 플라즈마 | - |
dc.subject | 방전모드 | - |
dc.subject | Atmospheric pressure plasma | - |
dc.subject | spectroscopic diagnostics | - |
dc.title | Study on discharge modes and characteristics of large-area plasma produced at atmospheric pressure | - |
dc.title.alternative | 대기압 방전 모드 및 대면적 플라즈마 특성에 대한 연구 | - |
dc.type | Thesis(Ph.D) | - |
dc.identifier.CNRN | 254167/325007 | - |
dc.description.department | 한국과학기술원 : 물리학과, | - |
dc.identifier.uid | 020015107 | - |
dc.contributor.localauthor | Moon, Se-Youn | - |
dc.contributor.localauthor | 문세연 | - |
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