학위논문(박사) - 한국과학기술원 : 물리학과, 2001.8, [ ix, 102 p. ]
광학상수; 이산화규소 박막; 게이트 산화막; 타원계측; Sellmeier 함수; Sellmeier function; optical constants; silicon dioxide film; gate oxide; ellipsometry
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