학위논문(석사) - 한국과학기술원 : 기계공학전공, 2006.2, [ vi, 49 p. ]
점회절 간섭계; 웨이퍼 표면형상; 진동둔감형 간섭계; vibration desensitized interferometer; point diffraction interferometer; Wafer surface profile
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