확장 트와이만-그린 간섭계를 이용한 직선 운동 오차의 실시간 보상Real-time compensation of motion errors using extended twyman-green interferometry
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김승우 | - |
| dc.contributor.advisor | Kim, Seung-Woo | - |
| dc.contributor.author | 배은덕 | - |
| dc.contributor.author | Bae, Eun-Deok | - |
| dc.date.accessioned | 2011-12-14T06:40:17Z | - |
| dc.date.available | 2011-12-14T06:40:17Z | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180114&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/45421 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ iv, 50 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 오차의 실시간 보상 | - |
| dc.subject | 트와이만 그린 간섭계 | - |
| dc.subject | Twyman-Green interferometry | - |
| dc.subject | Real-time Compensation of motion errors | - |
| dc.title | 확장 트와이만-그린 간섭계를 이용한 직선 운동 오차의 실시간 보상 | - |
| dc.title.alternative | Real-time compensation of motion errors using extended twyman-green interferometry | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 180114/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학전공, | - |
| dc.identifier.uid | 020013269 | - |
| dc.contributor.localauthor | 배은덕 | - |
| dc.contributor.localauthor | Bae, Eun-Deok | - |
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- ME-Theses_Master(석사논문)
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