SEM을 이용한 미세접합 및 모니터링 시스템 개발에 관한 연구A study on the development of SEM applied microjoining and monitoring system

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dc.contributor.advisor나석주-
dc.contributor.advisorNa, Suck-Joo-
dc.contributor.author황일한-
dc.contributor.authorHwang, Il-Han-
dc.date.accessioned2011-12-14T06:39:45Z-
dc.date.available2011-12-14T06:39:45Z-
dc.date.issued2003-
dc.identifier.urihttp://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180082&flag=dissertation-
dc.identifier.urihttp://hdl.handle.net/10203/45389-
dc.description학위논문(석사) - 한국과학기술원 : 기계공학전공, 2003.2, [ iii, 75 p. ]-
dc.languagekor-
dc.publisher한국과학기술원-
dc.subject주사식 전자 현미경-
dc.subject미세 접합-
dc.subjectmicrojoining-
dc.subjectSEM-
dc.titleSEM을 이용한 미세접합 및 모니터링 시스템 개발에 관한 연구-
dc.title.alternativeA study on the development of SEM applied microjoining and monitoring system-
dc.typeThesis(Master)-
dc.identifier.CNRN180082/325007-
dc.description.department한국과학기술원 : 기계공학전공, -
dc.identifier.uid020013660-
dc.contributor.localauthor황일한-
dc.contributor.localauthorHwang, Il-Han-
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ME-Theses_Master(석사논문)
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