효율적 정전기장 계산을 통한 MEMS구조물 해석에 대한 연구A study on the effective computational algorithm for electrostatic field for the analysis of MEMS structure
- Advisors
- 윤성기researcher; Youn, Sung-Kieresearcher
- Description
- 한국과학기술원 : 기계공학전공,
- Publisher
- 한국과학기술원
- Issue Date
- 2002
- Identifier
- 173865/325007 / 020003288
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 기계공학전공, 2002.2, [ viii, 76 p. ]
- Keywords
기준전위; 다중극근사방법; 경계요소법; 정전기장; 초소형정밀기계시스템; MEMS; reference potential; Multipole expansion algorithm; BEM; Electrostatic field
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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