학위논문(석사) - 한국과학기술원 : 기계공학전공, 2002.2, [ viii, 76 p. ]
기준전위; 다중극근사방법; 경계요소법; 정전기장; 초소형정밀기계시스템; MEMS; reference potential; Multipole expansion algorithm; BEM; Electrostatic field
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