질량유량계 센서관의 성능에 영향을 미치는 인자들에 관한 실험적 연구Experimental study on the effecting parameters to the performance of the sensor tube of a mass flow controller
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 김성진 | - |
| dc.contributor.advisor | Kim, Sung-Jin | - |
| dc.contributor.author | 한일영 | - |
| dc.contributor.author | Han, Il-Young | - |
| dc.date.accessioned | 2011-12-14T06:36:52Z | - |
| dc.date.available | 2011-12-14T06:36:52Z | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=165388&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/45214 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 기계공학전공, 2001.2, [ viii, 53 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 질량유량계 센서관 성능 | - |
| dc.subject | 질량유량계 센서관 | - |
| dc.subject | 질량유량계 | - |
| dc.subject | MFC | - |
| dc.subject | MFC sensor | - |
| dc.subject | mass flow meter | - |
| dc.subject | mass flow controller | - |
| dc.title | 질량유량계 센서관의 성능에 영향을 미치는 인자들에 관한 실험적 연구 | - |
| dc.title.alternative | Experimental study on the effecting parameters to the performance of the sensor tube of a mass flow controller | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 165388/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학전공, | - |
| dc.identifier.uid | 000983837 | - |
| dc.contributor.localauthor | 한일영 | - |
| dc.contributor.localauthor | Han, Il-Young | - |
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- ME-Theses_Master(석사논문)
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