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Results 1-1 of 1 (Search time: 0.002 seconds).

NO Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date)
1
A replacement of high-k process for CMOS transistor by atomic layer deposition

Han, Jin-Woo; Choi, Byung Joon; Yang, J. Joshua; Moon, Dong-Il; Choi, Yang-Kyu; Williams, R. Stanley; Meyyappan, M., SEMICONDUCTOR SCIENCE AND TECHNOLOGY, v.28, no.8, 2013-08

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