Browse "EE-Journal Papers(저널논문)" by Author VANDENABEELE, P
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| DEVELOPMENT OF A HEXAGONAL-SHAPED RAPID THERMAL PROCESSOR USING A VERTICAL TUBE Cho, Byung Jin; VANDENABEELE, P; MAEX, K, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.7, no.3, pp.345 - 353, 1994-08 |
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