미세패턴 측정을 위한 주사형 터널링 현미경 원리의 응용에 관한 연구A study on application of scanning tunneling microscopy for measurement of micro-patterns

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Advisors
김승우researcherKim, Seung-Wooresearcher
Description
한국과학기술원 : 정밀공학과,
Publisher
한국과학기술원
Issue Date
1993
Identifier
68477/325007 / 000911453
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 정밀공학과, 1993, [ v, 55 p. ]

URI
http://hdl.handle.net/10203/44178
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68477&flag=dissertation
Appears in Collection
ME-Theses_Master(석사논문)
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