위상 광간섭에 의한 표면형상의 초정밀 측정 알고리즘에 관한 연구Ultraprecision surface measurement algorithm based on phase measuring interferometry
- Advisors
- 김승우researcher; Kim, Seung-Wooresearcher
- Description
- 한국과학기술원 : 생산공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1991
- Identifier
- 68073/325007 / 000891088
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 생산공학과, 1991.2, [ [ii], 55 p. ]
- Appears in Collection
- ME-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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