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Nano-structural Characteristics of N-doped ZnO Thin films and Fabrication of Film Bulk Acoustic Resonator Devices

Lee, Eunju; Zhang,Ruirui; Yoon, Giwan, International Conference on the Physics of Semiconductors(ICPS) 2010, pp.257 - 258, American Institute of Physics: International Conference on the Physics of Semiconductors(ICPS) 2010, 2010-07

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