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Monolithic planar RF inductor and waveguide structures on silicon with performance comparable to those in GaAs MMIC

Kim, Bon-Kee; Ko, Beom-Kyu; Lee, Kwyro; Jeong, Ji-Won; Lee, Kun-Sang; Kim, Seong-Chan, Proceedings of the 1995 International Electron Devices Meeting, IEDM'95, pp.717 - 720, IEEE, 1995-12-10

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