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30nm Ultra-thin-body SOI MOSFET with selectively deposited Ge raised S/D

Choi, Yang-Kyu; Jeon, Yoo-Chan; Ranade, Pushkar; Takeuchi, Hideki; King, Tsu-Jae; Bokor, Jeffrey; Hu, Chenming, 58th Device Research Conference, pp.23 - 23, IEEE, 2000-06

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