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Showing results 1 to 4 of 4

1
A comparative study of multiple and single pulse laser annealing for ultrashallow boron junction formation

Cho, Byung Jin; Poon, D; Lu, YF; Bhat, M; See, A, Ultra-Shallow Junctions-2003 Workshop, pp.0 - 0, 2003-04-27

2
Electrical evaluation of laser annealed junctions by Hall measurement

Cho, Byung Jin; Poon, DCH; Tan, LS; Bhat, M; Chan, L, 2nd International Conference on Materials for Advanced Technologies, pp.578 - 578, 2003-12-11

3
Multiple-pulse laser annealing of boron-implanted preamorphized silicon and the process optimization

Cho, Byung Jin; Poon, D; Tan, LS; Bhat, M; See, A, IEEE 4th International Workshop on Junction Technology (IWJT-2004), pp.22 - 26, 2004-03-15

4
Process optimization for multiple-pulse laser annealing of boron implanted silicon with germanium pre-amorphization

Cho, Byung Jin; Poon, D; Lu, YF; Bhat, M; See, A, MRS Spring Meeting, pp.0 - 0, 2003-04-22

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