학위논문(박사) - 한국과학기술원 : 기계공학전공, 2001.8, [ xi, 137 p. ]
Gain scheduling control; Semi conductor manufacturing device; Optimal design; High precision stage; Nanometer control; 나노미터제어; 연속이득계획제어; 반도체장비; 최적설계; 초정밀 스테이지
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