백색광 주사간섭계의 측정정밀도 개선에 대한 연구Improvement of 3-dimensional profile measuring accuracy for white-light scanning interferometry

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Advisors
김승우researcherKim, Seung-Wooresearcher
Description
한국과학기술원 : 기계공학전공,
Publisher
한국과학기술원
Issue Date
2000
Identifier
162816/325007 / 000965147
Language
kor
Description

학위논문(박사) - 한국과학기술원 : 기계공학전공, 2000.8, [ ii, 123 p. ]

URI
http://hdl.handle.net/10203/43038
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=162816&flag=dissertation
Appears in Collection
ME-Theses_Ph.D.(박사논문)
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