증착률 균일화를 위한 화학증착 반응로에서 운전조건 및 형상 최적화에 관한 연구Operating condition and shape optimization of a CVD reactor for uniform film growth
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 최도형 | - |
| dc.contributor.advisor | Choi, Do-Hyung | - |
| dc.contributor.author | 조원국 | - |
| dc.contributor.author | Cho, Won-Kook | - |
| dc.date.accessioned | 2011-12-14T05:17:08Z | - |
| dc.date.available | 2011-12-14T05:17:08Z | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150537&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/42959 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 기계공학과, 1999.2, [ xv, 156 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 최적화 | - |
| dc.subject | 화학증착 | - |
| dc.subject | 전산유체역학 | - |
| dc.subject | 균일도 | - |
| dc.subject | Uniformity | - |
| dc.subject | Optimization | - |
| dc.subject | CVD | - |
| dc.subject | CFD | - |
| dc.title | 증착률 균일화를 위한 화학증착 반응로에서 운전조건 및 형상 최적화에 관한 연구 | - |
| dc.title.alternative | Operating condition and shape optimization of a CVD reactor for uniform film growth | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 150537/325007 | - |
| dc.description.department | 한국과학기술원 : 기계공학과, | - |
| dc.identifier.uid | 000945818 | - |
| dc.contributor.localauthor | 최도형 | - |
| dc.contributor.localauthor | Choi, Do-Hyung | - |
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