Rapid thermal process를 이용한 티타늄 실리사이드의 형성 및 그 응용Formation of titanium silicides by rapid thermal process and its applications
- Advisors
- 김충기; Kim, Choong-Ki
- Description
- 한국과학기술원 : 전기 및 전자공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1990
- Identifier
- 67368/325007 / 000881415
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1990.2, [ iii, 48 p. ]
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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