Fabrication of micromachined monolithic micro-probe with rounded anchor

Abstract

In this work, fabrication of the micromachined monolithic micro-probe with rounded anchor was proposed. The proposed micro-probe has the two characteristics compare with conventional micro-probe in probe card. The First, while most of all of conventional micro-probes were fabricated using the process of bonding with several substrates, proposed with good electrical property was fabricated on only one substrate by reverse process. Reverse process, proposed at this works, was fabricated by anchor, beam and tip in order. The fabrication of the micro-probe, which can test more fine pitch of pad, was possible using the proposed monolithic process. Also, cost of the fabrication was reduced by monolithic process. The second, the structure and the fabrication process of the micro-probe with rounded anchor to reduce the concentration of the stress at testing was proposed and set up. It is proved by simulation that proposed micro-probe with rounded anchor reduce the concentration of the stress as 35%. Fabricated micro-probe with rounded anchor using the proposed micromachined monolithic process satisfies the specification as follows. Pitch of pad : 100 μm, contact force : 7.1 gf, displacement : 100 μm, contact resistance : 4.2Ω, length of anchor : 300 μm.