DRAM storage capacitor용 고유전율 박막을 위한 Pt 하부전극에 관한 연구A study on Pt bottom electrode for high dielectric thin films of DRAM storage capacitor
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이희철 | - |
| dc.contributor.advisor | Lee, Hee-Chul | - |
| dc.contributor.author | 차선용 | - |
| dc.contributor.author | Cha, Seon-Yong | - |
| dc.date.accessioned | 2011-12-14T02:01:34Z | - |
| dc.date.available | 2011-12-14T02:01:34Z | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=99295&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/38305 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1995.2, [ ii, 93 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | DRAM storage capacitor용 고유전율 박막을 위한 Pt 하부전극에 관한 연구 | - |
| dc.title.alternative | A study on Pt bottom electrode for high dielectric thin films of DRAM storage capacitor | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 99295/325007 | - |
| dc.description.department | 한국과학기술원 : 전기및전자공학과, | - |
| dc.identifier.uid | 000933494 | - |
| dc.contributor.localauthor | 이희철 | - |
| dc.contributor.localauthor | Lee, Hee-Chul | - |
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- EE-Theses_Master(석사논문)
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