수은 증감 광화학기상증착법에 의한 미결정 실리콘과 에피 실리콘 박막의 제작과 특성Preparation and characteristics of microcrystalline Si:H and epitaxial Si deposited by mercury sensitized photo chemical vapor deposition
- Advisors
- 임굉수researcher; Lim, Keong-Suresearcher
- Description
- 한국과학기술원 : 전기및전자공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1995
- Identifier
- 99266/325007 / 000933266
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1995.2, [ iii, 97 p. ]
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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