ECR 열산화막의 특성분석 및 다결정실리콘 박막트랜지스터에의 응용Characterization of ECR thermal oxide and its application to polysilicon TFT's
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 한철희 | - |
| dc.contributor.advisor | Han, Chul-Hi | - |
| dc.contributor.author | 오길환 | - |
| dc.contributor.author | Oh, Kil-Hwan | - |
| dc.date.accessioned | 2011-12-14T01:59:12Z | - |
| dc.date.available | 2011-12-14T01:59:12Z | - |
| dc.date.issued | 1993 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=68863&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/38148 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1993.2, [ [iii], 49 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | ECR 열산화막의 특성분석 및 다결정실리콘 박막트랜지스터에의 응용 | - |
| dc.title.alternative | Characterization of ECR thermal oxide and its application to polysilicon TFT's | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 68863/325007 | - |
| dc.description.department | 한국과학기술원 : 전기 및 전자공학과, | - |
| dc.identifier.uid | 000911357 | - |
| dc.contributor.localauthor | 한철희 | - |
| dc.contributor.localauthor | Han, Chul-Hi | - |
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.