적외선 센서의 볼로미터 저항체로 사용된 다결정 실리콘 박막에 발생하는 TCR 및 1/f Noise의 최적화 방법에 관한 연구A research on how to optimize the level of the TCR and 1/f noise which occur in the polycrystalline silicon film used as a bolometer resistor

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Advisors
이희철researcherLee, Hee-Chulresearcher
Description
한국과학기술원 : 전기및전자공학전공,
Publisher
한국과학기술원
Issue Date
2006
Identifier
255507/325007  / 020033373
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 전기및전자공학전공, 2006.2, [ iv, 81 p. ]

Keywords

다결정 실리콘; 그레인 크기; 1/f 잡음; 열온도 계수; 볼로미터; Bolometer; Polycrystalline silicon; grain size; 1/f noise; Temperature Coefficient of Resistance

URI
http://hdl.handle.net/10203/37943
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=255507&flag=dissertation
Appears in Collection
EE-Theses_Master(석사논문)
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