Passivation효과를 고려한 InP기반 HEMT의 공정 최적화Fabrication process optimization for InP-based HEMTs considering the passivation effects
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 양경훈 | - |
| dc.contributor.advisor | Yang, Kyoung-Hoon | - |
| dc.contributor.author | 김대희 | - |
| dc.contributor.author | Kim, Dae-Hee | - |
| dc.date.accessioned | 2011-12-14T01:51:06Z | - |
| dc.date.available | 2011-12-14T01:51:06Z | - |
| dc.date.issued | 2003 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=180457&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/37626 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 전기및전자공학전공, 2003.2, [ [iii], 61 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 선택적 식각 | - |
| dc.subject | 화합물반도체 | - |
| dc.subject | 양자우물 | - |
| dc.subject | 초고속 | - |
| dc.subject | InP | - |
| dc.subject | quantum well | - |
| dc.subject | BCB | - |
| dc.subject | passivation | - |
| dc.subject | HEMT | - |
| dc.title | Passivation효과를 고려한 InP기반 HEMT의 공정 최적화 | - |
| dc.title.alternative | Fabrication process optimization for InP-based HEMTs considering the passivation effects | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 180457/325007 | - |
| dc.description.department | 한국과학기술원 : 전기및전자공학전공, | - |
| dc.identifier.uid | 020013058 | - |
| dc.contributor.localauthor | 양경훈 | - |
| dc.contributor.localauthor | Yang, Kyoung-Hoon | - |
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- EE-Theses_Master(석사논문)
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