Laser lithography를 위한 autofocusing system 구현과 mixer의 설계 및 제작Implementation of the auto focusing system for laser lithography and fabrication of the mixer
- Advisors
- 권영세researcher; Kwon, Young-Seresearcher
- Description
- 한국과학기술원 : 전기및전자공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1997
- Identifier
- 114259/325007 / 000953564
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 1997.2, [ [ii], 45, [28] p. ]
- Keywords
주파수 혼합기; 묘화; 자동초점; Auto focusing; Dual gate; Mixer; Lithography
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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