RF magnetron sputtering 법에 의한 $Ba_{0.7}Sr_{0.3}TiO_3$ 박막의 제조 및 전기적 특성 평가Fabrications and charaterizations of electrical properties of $Ba_{0.7}Sr_{0.3}TiO_3$ thin films deposited by rf magnetron sputtering
- Advisors
- 이희철researcher; Lee, Hee-Chulresearcher
- Description
- 한국과학기술원 : 전기 및 전자공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 106396/325007 / 000943404
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전기 및 전자공학과, 1996.2, [ ii, 76 p. ]
- Keywords
산화막 유효두께; 유전상수; 계면; 산소결핍; O2 vacancy; Equivalent oxide thickness; Dielectric constant; Interface
- Appears in Collection
- EE-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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