Amidoalane과 triethylboron-amine complex의 합성 및 단일 전구체 OMCVD법에 의한 AIN 박막의 제조Synthesis of amidoalanes and triethylboron-amine complexes and preparation of AIN thin films by single-precursor OMCVD
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 박준택 | - |
| dc.contributor.advisor | Park, Joon-Taik | - |
| dc.contributor.author | 오원태 | - |
| dc.contributor.author | Oh, Weon-Tae | - |
| dc.date.accessioned | 2011-12-13T04:59:53Z | - |
| dc.date.available | 2011-12-13T04:59:53Z | - |
| dc.date.issued | 1994 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=69181&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/32668 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 화학과, 1994.2, [ vii, 50 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | Amidoalane과 triethylboron-amine complex의 합성 및 단일 전구체 OMCVD법에 의한 AIN 박막의 제조 | - |
| dc.title.alternative | Synthesis of amidoalanes and triethylboron-amine complexes and preparation of AIN thin films by single-precursor OMCVD | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 69181/325007 | - |
| dc.description.department | 한국과학기술원 : 화학과, | - |
| dc.identifier.uid | 000923296 | - |
| dc.contributor.localauthor | 박준택 | - |
| dc.contributor.localauthor | Park, Joon-Taik | - |
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- CH-Theses_Master(석사논문)
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