Photochemical crosslinking, enzymatic degradation and lithographic application of biodegradable Polyhydroxyalkanoates생분해성 폴리하이드록시알카노에이트의 광화학적 가교, 효소분해 및 포토레지스트로의 응용
Biodegradable poly(3-hydroxyundecenoate) (PHU) and poly(3-hydroxybutyrated-co-3-hydroxyvalerate) (PHBV) were crosslinked most efficiently on irradiation with diphenyl(2,4,6-trimethylbenzoylphosphine oxide) or benzophenone sensitizers. Well-defined patterns were obtained by enzymatic degradation of irradiated PHU under contact masks since the depolymerization rate was considerably slower than that of nature PHU. Patterened images with width of 2.5, 4.5, 8 and 10 ㎛ were obtained indicating the possible application of PHAs as environment-friendly photoresists.
- Advisors
- Shim, Sang-Chul; Kim, Jin-Baek; Shim, Hong-Ku; 심상철; 김진백; 심홍구; 심상철
- Description
- 한국과학기술원 : 화학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2001
- Identifier
- 166002/325007 / 000993090
- Language
- eng
- Description
학위논문(석사) - 한국과학기술원 : 화학과, 2001.2, [ iii, 45 p. ]
- Keywords
Polyhydroxyalkanoates; Photoresist; Lithography; 폴리하이드록시알카노에이트; 가교; 효소분해; 포토레지스트; 생분해; Crosslinking; Degradation
- Appears in Collection
- CH-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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