PATTERN STRUCTURE INSPECTION DEVICE AND INSPECTION METHOD패턴 구조물 검사 장치 및 검사 방법
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Yong Keun | ko |
| dc.contributor.author | Park, Jong Chan | ko |
| dc.date.accessioned | 2024-01-18T10:00:16Z | - |
| dc.date.available | 2024-01-18T10:00:16Z | - |
| dc.identifier.uri | http://hdl.handle.net/10203/317911 | - |
| dc.description.abstract | According to an aspect of the present invention, there is provided a pattern structure inspection method including irradiating a wave from a wave source onto a sample including a pattern region in which a structure having a certain pattern is provided on a substrate, collecting speckle data generated due to multiple scattering of the wave in the pattern region, by using a data collector, and analyzing whether the structure of the pattern region has a defect, by comparing the collected speckle data to reference speckle data. | - |
| dc.title | PATTERN STRUCTURE INSPECTION DEVICE AND INSPECTION METHOD | - |
| dc.title.alternative | 패턴 구조물 검사 장치 및 검사 방법 | - |
| dc.type | Patent | - |
| dc.type.rims | PAT | - |
| dc.contributor.localauthor | Park, Yong Keun | - |
| dc.contributor.assignee | KAIST, The Wave Talk, Inc. | - |
| dc.identifier.iprsType | 특허 | - |
| dc.identifier.patentApplicationNumber | 17807037.1 | - |
| dc.identifier.patentRegistrationNumber | 3467483 | - |
| dc.date.application | 2017-06-01 | - |
| dc.date.registration | 2023-09-20 | - |
| dc.publisher.country | FR | - |
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