DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Juhwan | ko |
dc.contributor.author | Park, Heejin | ko |
dc.contributor.author | Lee, Wonmoo | ko |
dc.contributor.author | Park, Kangho | ko |
dc.contributor.author | Kwon, Kiok | ko |
dc.contributor.author | Jung, Hee-Tae | ko |
dc.date.accessioned | 2024-01-02T07:00:40Z | - |
dc.date.available | 2024-01-02T07:00:40Z | - |
dc.date.created | 2024-01-02 | - |
dc.date.issued | 2023-12 | - |
dc.identifier.citation | LANGMUIR, v.39, no.50, pp.18229 - 18237 | - |
dc.identifier.issn | 0743-7463 | - |
dc.identifier.uri | http://hdl.handle.net/10203/317186 | - |
dc.description.abstract | Density multiplication in nanopatterning is one of the most efficient techniques for increasing the resolution of the inherent patterns. Thus far, most of the density multiplication techniques integrate bottom-up (or top-down) patterning onto guide patterns prepared by the top-down approach. Although the bottom-up approach exhibits several advantages of cost-effectiveness and high resolution, very few studies have reported bottom-up patterning within a bottom-up template. In this study, the density multiplication of supramolecular cylinders into a block copolymer (BCP)-based guide lamellar pattern is demonstrated by the directed self-assembly (DSA) of a dendrimer and BCPs for the first time. Supramolecular cylinders of sub-5 nm scale are confined into trenches based on 50 and 100 nm scales of a lamellar polystyrene (PS)-poly-(methyl methacrylate) (PMMA) BCP, which led to 10x-level to 20x-level density multiplication. Moreover, the orientation of the dendrimer is dependent on the dendrimer film thickness, and the corresponding mechanism is revealed. Notably, the strong guiding effect from the high-resolution guide patterns improved the ordering behavior in the highly curved pattern. Graphoepitaxy via the confinement of an ultrahigh-resolution dendrimer into the guide pattern based on BCP demonstrates promise as a density multiplication method for generating highly ordered nanostructures and complex structures. | - |
dc.language | English | - |
dc.publisher | AMER CHEMICAL SOC | - |
dc.title | Density Multiplication of Highly Periodic Sub-5 nm Supramolecular Dendrimer Cylinders on Block Copolymer Lamellar-Assisted High-Resolution Patterns | - |
dc.type | Article | - |
dc.identifier.wosid | 001128006400001 | - |
dc.identifier.scopusid | 2-s2.0-85180076020 | - |
dc.type.rims | ART | - |
dc.citation.volume | 39 | - |
dc.citation.issue | 50 | - |
dc.citation.beginningpage | 18229 | - |
dc.citation.endingpage | 18237 | - |
dc.citation.publicationname | LANGMUIR | - |
dc.identifier.doi | 10.1021/acs.langmuir.3c01988 | - |
dc.contributor.localauthor | Jung, Hee-Tae | - |
dc.contributor.nonIdAuthor | Park, Heejin | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | BUILDING-BLOCKS | - |
dc.subject.keywordPlus | NANOSTRUCTURES | - |
dc.subject.keywordPlus | NANOLITHOGRAPHY | - |
dc.subject.keywordPlus | LITHOGRAPHY | - |
dc.subject.keywordPlus | ALIGNMENT | - |
dc.subject.keywordPlus | CRYSTALS | - |
dc.subject.keywordPlus | SURFACE | - |
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