Interface formation of group Ⅱ fluorides on si(111)and surface chemistry of copper chemical vapor deposition실리콘(111)표면과 Ⅱ족 불소 화합물의 계면연구 및 구리 화학증착의 표면화학
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | Kim, Se-Hun | - |
| dc.contributor.advisor | 김세훈 | - |
| dc.contributor.author | Chung, Young-Su | - |
| dc.contributor.author | 정영수 | - |
| dc.date.accessioned | 2011-12-13T04:28:41Z | - |
| dc.date.available | 2011-12-13T04:28:41Z | - |
| dc.date.issued | 2000 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=162774&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/31542 | - |
| dc.description | 학위논문(박사) - 한국과학기술원 : 화학과, 2000.8, [ x, 94 p. ] | - |
| dc.language | eng | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | Interface formation of group Ⅱ fluorides on si(111)and surface chemistry of copper chemical vapor deposition | - |
| dc.title.alternative | 실리콘(111)표면과 Ⅱ족 불소 화합물의 계면연구 및 구리 화학증착의 표면화학 | - |
| dc.type | Thesis(Ph.D) | - |
| dc.identifier.CNRN | 162774/325007 | - |
| dc.description.department | 한국과학기술원 : 화학과, | - |
| dc.identifier.uid | 000965359 | - |
| dc.contributor.localauthor | Kim, Se-Hun | - |
| dc.contributor.localauthor | 김세훈 | - |
- Appears in Collection
- CH-Theses_Ph.D.(박사논문)
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