Excimer Laser Dopant Activation For Monolithic 3D Integration
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, Young Bin | ko |
| dc.contributor.author | Lee, Keon Jae | ko |
| dc.date.accessioned | 2023-11-21T09:04:20Z | - |
| dc.date.available | 2023-11-21T09:04:20Z | - |
| dc.date.created | 2023-11-21 | - |
| dc.date.issued | 2023-06-08 | - |
| dc.identifier.citation | Global Conference on Innovation Materials, GCIM 2023 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/314977 | - |
| dc.language | English | - |
| dc.publisher | The Materials Research Society of Korea | - |
| dc.title | Excimer Laser Dopant Activation For Monolithic 3D Integration | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Global Conference on Innovation Materials, GCIM 2023 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | JEJU ICC | - |
| dc.contributor.localauthor | Lee, Keon Jae | - |
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