Design and analysis of Halbach VCM actuator for 6-DOF active vibration isolation system

Abstract

In recent years, as nano-precision technologies develop at a fast-growing rate, the ultra-precision measuring instrument requires having high-speed, high-precision and accurate performance. Generally, the bench- Top type of 6-DOF active vibration isolation system(AVIS) has been widely used in ultra-precision measuring areas. Although there have been many researches in various AVIS technologies, obtaining a high force constant with compact size is still challenging. In this paper, a novel 6-DOF AVIS based on a Halbach magnet array VCM actuator that have high force constant is proposed. The proposed AVIS based on a Halbach magnet array VCM actuator is optimally designed to provide high power. High power of proposed VCM actuator was verified by comparison with general VCM actuator. A novel AVIS with high power actuator was manufactured with optimally designed parameters, and its performance was evaluated.