Area-Selective ALD on 2D Monolayer Lateral Superlattice Template
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, Jeongwon | ko |
| dc.contributor.author | Kang, Kibum | ko |
| dc.date.accessioned | 2023-01-31T05:01:49Z | - |
| dc.date.available | 2023-01-31T05:01:49Z | - |
| dc.date.created | 2023-01-10 | - |
| dc.date.issued | 2022-07-06 | - |
| dc.identifier.citation | Advanced Epitaxy for Freestanding Membranes and 2D Materials, AEFM 2022 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/304825 | - |
| dc.language | English | - |
| dc.publisher | Massachusetts Institute of Technology | - |
| dc.title | Area-Selective ALD on 2D Monolayer Lateral Superlattice Template | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Advanced Epitaxy for Freestanding Membranes and 2D Materials, AEFM 2022 | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Cambridge, MA | - |
| dc.contributor.localauthor | Kang, Kibum | - |
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