DC Field | Value | Language |
---|---|---|
dc.contributor.author | Ahn, Changmin | ko |
dc.contributor.author | Na, Yongjin | ko |
dc.contributor.author | Kim, Jungwon | ko |
dc.date.accessioned | 2023-01-16T08:00:30Z | - |
dc.date.available | 2023-01-16T08:00:30Z | - |
dc.date.created | 2023-01-16 | - |
dc.date.created | 2023-01-16 | - |
dc.date.issued | 2023-03 | - |
dc.identifier.citation | OPTICS AND LASERS IN ENGINEERING, v.162 | - |
dc.identifier.issn | 0143-8166 | - |
dc.identifier.uri | http://hdl.handle.net/10203/304470 | - |
dc.description.abstract | Distance metrology is crucial in supporting modern science and technology such as satellites interconnection, autonomous driving, motion control, and precision manufacturing. A combined method, which is a simultaneous distance measurement with multiple methods, was developed and widely utilized to increase the measurable range while maintaining high precision. However, the measurement speed has been limited to a few kHz due to the requirement for combining a precision measurement with a long-range measurement. In this work, we present a new dynamic distance measurement method based on electro-optic sampling timing detection (EOS-TD) that can preserve the non-ambiguity range (NAR) extension even at >1 MHz acquisition rate. By combining the EOS-TD-based pulse time-of-flight detection method with a microwave phase detection method, 300-mm NAR and 49-nm precision are made possible at 1-mu s acquisition time. With longer averaging time, the best precision of 0.99 nm is achieved at 0.22-s acquisition time, corresponding to 169 dB maximum dynamic range. As a demonstration experiment, two mirrors that were similar to 83 mm apart and each controlled by a piezo actuator with hundreds of nanometers of displacement variations had their distance between them precisely measured. | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCI LTD | - |
dc.title | Dynamic absolute distance measurement with nanometer-precision and MHz acquisition rate using a frequency comb-based combined method | - |
dc.type | Article | - |
dc.identifier.wosid | 000898786100007 | - |
dc.identifier.scopusid | 2-s2.0-85143900318 | - |
dc.type.rims | ART | - |
dc.citation.volume | 162 | - |
dc.citation.publicationname | OPTICS AND LASERS IN ENGINEERING | - |
dc.identifier.doi | 10.1016/j.optlaseng.2022.107414 | - |
dc.contributor.localauthor | Kim, Jungwon | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | Optical frequency comb | - |
dc.subject.keywordAuthor | Time-of-flight detection | - |
dc.subject.keywordAuthor | Distance measurement | - |
dc.subject.keywordAuthor | Electro-optic sampling | - |
dc.subject.keywordPlus | INTERFEROMETRY | - |
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