Etching Dynamics of Geometrically Confined Silicon Nanostructure
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Koo, Kunmo | ko |
| dc.contributor.author | Yuk, Jong Min | ko |
| dc.contributor.author | Chang, Joon Ha | ko |
| dc.contributor.author | Ji, Sanghyeon | ko |
| dc.contributor.author | Choi, Jacob | ko |
| dc.contributor.author | Shin, Sengmin | ko |
| dc.contributor.author | Lee, Geun-Taek | ko |
| dc.contributor.author | Kim, Tae-Hong | ko |
| dc.date.accessioned | 2023-01-12T11:01:05Z | - |
| dc.date.available | 2023-01-12T11:01:05Z | - |
| dc.date.created | 2023-01-09 | - |
| dc.date.issued | 2022-08-02 | - |
| dc.identifier.citation | 2022 Microscopy and Microanalysis | - |
| dc.identifier.uri | http://hdl.handle.net/10203/304362 | - |
| dc.language | Korean | - |
| dc.publisher | Microscopy Society of America | - |
| dc.title | Etching Dynamics of Geometrically Confined Silicon Nanostructure | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2022 Microscopy and Microanalysis | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Portland, Oregon | - |
| dc.contributor.localauthor | Yuk, Jong Min | - |
| dc.contributor.nonIdAuthor | Shin, Sengmin | - |
| dc.contributor.nonIdAuthor | Lee, Geun-Taek | - |
| dc.contributor.nonIdAuthor | Kim, Tae-Hong | - |
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