텅스텐 건식에칭에서 $CF_4/O_2$가스계에 CO 와 $CO_2$첨가 효과Effect of addition of CO and $CO_2$ to $CF_4/O_2$ etching system for tungsten etching
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 정인재 | - |
| dc.contributor.advisor | 우성일 | - |
| dc.contributor.advisor | Chung, In-Jae | - |
| dc.contributor.advisor | Woo, Seong-Ihl | - |
| dc.contributor.author | 권성구 | - |
| dc.contributor.author | Kwon, Sung-Ku | - |
| dc.date.accessioned | 2011-12-13T02:06:21Z | - |
| dc.date.available | 2011-12-13T02:06:21Z | - |
| dc.date.issued | 1991 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=67724&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/30410 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 화학공학과, 1991.2, [ [xv], 127 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.title | 텅스텐 건식에칭에서 $CF_4/O_2$가스계에 CO 와 $CO_2$첨가 효과 | - |
| dc.title.alternative | Effect of addition of CO and $CO_2$ to $CF_4/O_2$ etching system for tungsten etching | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 67724/325007 | - |
| dc.description.department | 한국과학기술원 : 화학공학과, | - |
| dc.identifier.uid | 000891024 | - |
| dc.contributor.localauthor | 정인재 | - |
| dc.contributor.localauthor | 우성일 | - |
| dc.contributor.localauthor | Chung, In-Jae | - |
| dc.contributor.localauthor | Woo, Seong-Ihl | - |
- Appears in Collection
- CBE-Theses_Master(석사논문)
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